| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/KnjUK |
| Repository | sid.inpe.br/iris@1916/2006/03.06.16.44 |
| Last Update | 2006:03.06.16.44.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1916/2006/03.06.16.44.23 |
| Metadata Last Update | 2018:06.05.01.28.34 (UTC) administrator |
| Secondary Key | INPE-13575-PRE/8785 |
| ISSN | 0021-8979 |
| Citation Key | AlvesLiebVaheBird:1991:ShVoRa |
| Title | Sheath voltage ratio for asymmetric rf discharges  |
| Project | Simulações computacionais de fenômenos físicos em plasmas espaciais |
| Year | 1991 |
| Month | Apr |
| Access Date | 2024, May 17 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 675 KiB |
| 2. Context | |
| Author | 1 Alves, Maria Virgínia 2 Lieberman, M. A. 3 Vahedi, V. 4 Birdsall, C. K. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHRS |
| Group | 1 LAP-INPE-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Plasmas (INPE. LAP) 2 University of California, Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory 3 University of California, Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory 4 University of California, Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory |
| Journal | Journal of Applied Physics |
| Volume | 69 |
| Number | 7 |
| Pages | 3823-3829 |
| History (UTC) | 2006-03-06 16:44:23 :: vinicius -> administrator :: 2006-09-28 22:35:48 :: administrator -> vinicius :: 2008-01-17 15:54:41 :: vinicius -> administrator :: 2008-06-10 22:04:00 :: administrator -> vinicius :: 2011-05-24 11:39:21 :: vinicius -> administrator :: 2018-06-05 01:28:34 :: administrator -> marciana :: 1991 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | PLASMA Spherical particle Cylindrical particles Radio frequency Discharges PLASMA Partículas esféricas Partículas cilíndricas Rádio freqüência Descargas |
| Abstract | Spherical and cylindrical many-particle models are used to simulate rf (radio frequency) discharges in which the rf powered and the grounded electrodes have different areas. This asymmetry determines the magnitude of the average plasma-to-electrode voltage I, (the ion bombarding energy) at the smaller powered electrode, which is a critical process parameter. A collisionless uniform ionization discharge model predicts that the voltage ratio V,/V, scales as the fourth power of the electrode area ratio AdA,, where V, is the potential drop at the other electrode. However, measurements indicate a much weaker dependence of V,/V, on the area ratio, which is also observed in our simulations. Over a limited range of area ratios it was found that the power dependence was close to one, in agreement with a local ionization discharge model. The simulation codes used are PDCl (plasma device cylindrical one-dimensional) and PDSl (plasma device spherical one-dimensional). |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Sheath voltage ratio... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| data URL | http://urlib.net/ibi/6qtX3pFwXQZ3r59YDa/KnjUK |
| zipped data URL | http://urlib.net/zip/6qtX3pFwXQZ3r59YDa/KnjUK |
| Language | en |
| Target File | 22.pdf |
| User Group | administrator vinicius |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | allowpublisher allowfinaldraft |
| Read Permission | allow from all |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/bibdigital/2013/09.25.21.49 1 sid.inpe.br/mtc-m21/2012/07.13.14.55.54 1 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |